The 6th International Conference
on the
Physics of X-Ray Multilayer Structures


Sunday Monday TuesdayWednesday Thursday


12:00-22:00 Registration

19:00-22:00 Welcome Reception / Buffet Dinner


8:00-8:10 Opening Remarks

8:10-9:30 Session 1

8:10-8:50 1.1 INVITED Multilayer optics for spectral range lambda= 0.01 - 30 nm: technology fabrication and application N.N. Salashchenko, Institute for Physics of Microstructures, RAS, GSP-105 Nizhny Novgorod, 603600 Russia

8:50-9:10 1.2 High near-normal reflectivity in the water window of Cr/Sc multilayer X-ray mirrors Fredrik Eriksson*,a , Eric M. Gullikson b Göran A. Johansson c , Hans M. Hertz c , Jens Birch a a: Thin Film Physics Division, IFM, Linköping University, SE-581 83 Linköping, Sweden b: LBNL 2-400, 1 Cyclotron Rd., Berkeley, CA 94720, United States of America c: Biomedical and X-Ray Physics, Royal Institute of Technology/SCFAB, SE-106 91 Stockholm, Sweden

9:10-9:30 1.3 Multilayers based on light material for optics in the 30 nm wavelength region Marie-Françoise RAVET, Françoise BRIDOU, Frank DELMOTTE, Arnaud JEROME Groupe de Physique des Films Minces, Laboratoire Charles Fabry de l'Institut d'Optique, CNRS UMR 8501, Centre Scientifique Bâtiment 503 , BP 147, 91403 Orsay, Cedex FRANCE.  Jean-Pierre DELABOUDINIERE, Xueyan SONG, Marie BOUGNET Institut d'Astrophysique Spatiale, Université Paris-Sud Bâtiment 121, 91405 ORSAY Cedex, FRANCE

9:30-10:00 Break

10:00-12:00 Session 2

10:00-10:40 2.1 INVITED Multilayer normal-incidence gratings with Sc/Si, MoRu/Be, and Mo/Y coatings operating at 40 nm, 11 nm, and 9 nm wavelengths: experimental efficiencies and computational modeling John F. Seely, Space Science Division, Code 7674, Naval Research Laboratory, Washington DC 20375,Leonid I. Goray, International Intellectual Group Inc., P.O. Box 335, Penfield, NY 14526, Alexander Vinogradov and Yu. A. Uspenskii, Lebedev Physical Institute, X-Ray Optics Group, Moscow, Russia, Yu. P. Pershin and V. V. Kondratenko, Kharkov State Polytechnic University, Ukraine, Benjawan Sae-Lao, Sasa Bajt and Sherry Baker, Information Science & Technology, Lawrence Livermore National Laboratory, P.O. Box 808, L-395, Livermore, California 94551, Claude Montcalm, Veeco-Ion Tech, 2330 East Prospect, Fort Collins, CO 80525

10:40-11:00 2.2 Reflectivity and stability of Cr/Sc multilayers for the soft X-ray range Sergiy Yulin, Thomas Kuhlmann, Torsten Feigl, Norbert Kaiser, Fraunhofer-Institut fur Angewandte Optik und Feinmechanik, Schillerstrasse 1, D - 07745 Jena, Germany

11:00-11:20 2.3 New method for the determination of EUV optical constants in chemically active materials: Application to Sc and Ti. Yu.A. Uspenskii a , J.F. Seely b , N.L. Popov a , A.V. Vinogradov a , Yu.P. Pershin c , and V.V. Kondratenko c a: Lebedev Physical Institute, Leninski pr. 53, 119991 Moscow, Russia b: Naval Research Laboratory, Washingthon DC 20375, USA c: Kharkov State Polytechnic University, Frunze str., Kharkiv 310002, Ukraine

11:20-12:00 2.4 INVITED New multilayer concepts for the extreme ultraviolet Juan I. Larruquert, José A. Aznárez, José A. Méndez Instituto de Física Aplicada-CSIC, Madrid, Spain

12:00-18:30 Free

18:30-20:00 Dinner

20:00-22:00 POSTER SESSION I

P1.1 Production and performance of multilayer coated conic sections M. P. Ulmer a R. I. Altkorn a M. E. Graha b A. Madan b and Y. S. Chu c a: Dept. of Physics & Astronomy, Northwestern University 2131 Sheridan Rd, Evanston, IL 60208-2900, USA b: Advanced Coating Technology Group, Northwestern University 1801 Maple Ave, Evanston, IL 60208-3140, USA c: Advanced Photon Source, Argonne National Lab, 9700 S. Cass Avenue, Argonne, IL 60439, USA

P1.2 Defect propagation within multilayer structures: experimental results and optical modeling L. Wang, Y. Ma, T. Gene and F. Cerrina, Center for Nanotechnology Department of Electrical and Computer Engineering University of Wisconsin-Madison

P1.3 Influence of substrate bias voltages on the structure of Mo/Si multilayers E.N. Zubarev, V.V. Kondratenko, V.A. Sevryukova, A.V. Zhurba, S.P. Rubets National Technical University, Kharkov, Ukraine
S. Yulin, T. Feigle, T. Kuhlmann, N. Kaiser Fraunhofer Institute Angewandte Optik und Feinmechanik, Jena, Germany

P1.4 Parametric Radiation emitted from a periodic multilayer target : an efficient tunable x-ray source B. Pardo, Laboratoire Charles Fabry de l'Institut d'Optique, Université Paris-Sud, France. J.-M. André, Laboratoire de Chimie Physique Matière et Rayonnement, UMR 7614 CNRS, Université Paris VI, France.

P1.5 Features of the metal surface treatment with ion beam during fabrication of Ni/C X-ray multilayers
V.V. Kondratenko, Yu. P. Pershyn, Ye. N. Zubarev, National Technical University in Kharkov Polytechnic Institutelc, Frunze street 21, Kharkov, 61002, Ukraine, J. Verhoeven, FOM AMOLF, Kruislaan 407, 1098SJ, Amsterdam, The Netherlands

P1.6 A high NA compact debris stopper for use with a LPP source of multilayer imaging optics Kentaro Sekiyama, Tsuyoshi Kanda, Tadashi Hatano, Minaji Furudate and Masaki Yamamoto, Research Center for Soft X-ray microscopy, Inst. of Multidisciplinary Res. for Adv. Mat., Tohoku Univ., Japan

P1.7 New multilayer mirrors for soft X-rays C. Michaelsen and J. Wiesmann, Institute of Materials Research,GKSS Research Center,21502 Geesthacht,Germany, C. Nowak and B. Steeg, HASYLAB,DESY,22603 Hamburg,Germany, S. Hollensteiner,C. Dieker,and W. Jäger, University of Kiel,Center for Microanalysis,Faculty of Engineering,24143 Kiel,Germany

P1.8 X-ray and AFM study of the roughness of W and B4C films, and of W/B4C multilayer mirrors Igor V. Kozhevnikov a , Victor E. Asadchikov b , Inna N. Bukreeva a , Angela Duparré c ,Yury S. Krivonosov b , Till H.Metzger d , Christian Morawe d , Mikhail V. Pyatakhin a , Jörg Steinert c , and Eric Ziegler d a: Lebedev Physical Institute, Leninsky prospect 53, Moscow 119991, Russia b: Institute of Crystallography, Leninsky prospect 59, Moscow 117333, Russia c: Fraunhofer Institute for Applied Optics and Precision Engineering, Schillerstrasse 1, D-07745, Jena, Germany d: European Synchrotron Radiation Facility, BP 220, 38043 Grenoble Cedex, France

P1.9 In situ analysis of stress relaxation and interface mixing during the growth of metallic epitaxial films and multilayers T. Bigault, European Synchrotron Radiation Facility, BP 220, 38043 Grenoble, France, F. Bocquet, S. Labat, O. Thomas, TECSEN, Faculté des Scinces et Techniques de Saint Jérôme, 13397 Marseille Cedex 20, France, B. Gilles, LTPCM, ENSEEG, BP75, 38402 Saint-Martin d'Hères, France, A.Marty DRFMC / SP2M / NM CEA-Grenoble, 17 rue des Martyrs, 38054 Grenoble, France

P1.10 Normal incidence La/B4C multilayers for wavelengths around B-K radiation line Yuriy Platonov, Osmic, Inc., 1788 Northwood Drive, Troy, MI 48084, USA

P1.11 Single Crystal CrN/ScN (001) as X-Ray Superlattice Mirrors for the Water Window J. Birch, a F. Eriksson, a T. Joelsson, a G. A. Johansson, b L. Hultman, a and H. M. Hertz, b a: Department of Physics and Measurement Technology, Linköping University, SE-581 83 Linköping, Sweden. b: Biomedical and X-ray Physics, The Royal Institute of Tehnology, SE-100 44 Stockholm Sweden

P1.12 Thermal Studies on Mo/Si Multilayer by TEM A.K.Srivastava, P.Tripathi, G.S.Lodha, M.Nayak, R.V.Nandedkar, Centre for Advanced Technology, Indore, 452013, India

P1.13 Multi-layer mirrors (MIM's) diagnosis for XUV source calibration G. Soullie, C. Lafon, R. Rosch, S. Huelvan, R. Marmoret, CEA DIF / DCRE / SDE Centre d'etudes de Bruyeres le Chatel, BP 12, 91680, Bruyeres le Chatel, France

P1.14 Design and fabrication of aperiodic multilayers for near grazing incidence X-UV optics at 3.4 keV F. Bridou, R. Mercier, A. Raynal, P. Fournet, Laboratoire Charles Fabry de l'Institut d'Optique, CNRS UMR 8501, Centre Scientifique Batiment 503, BP 147, 91403 Orsay, France. M. Idir, Groupe Optique,Laboratoire de Spectroscopie Atomique et Ionique,Bat 209 D, Centre Universitaire Paris Sud, BP 34, 91898 Orsay Cedex, France. G. Soullié, P. Troussel, CEA-DAM/DRIF/DCRE/SDE, BP 12, 91680, Bruyères-le-Châtel, France.

P1.15 Diffraction-limited astronomical X-ray imaging using multilayer optics D. L. Windt, Columbia Astrophysics Laboratory, 550 West 120 th Street, New York, NY 10027, G. E. Sommargren, Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, CA 94550

P1.16 Programmable deposition shutter for multilayer thickness control of ion beam sputtering Tadashi Hatano, Shogo Kubota and Masaki Yamamoto, Research Center for Soft X-ray Microscopy, IMRAM, Tohoku University 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan

P1.17 Multilayer optics by Ni electroforming replication: surface characterization of mirror and mandrel prototypes G. Pareschi 1 , O. Citterio and F. Mazzoleni, Osservatorio Astronomico di Brera - Via Bianchi 46 ? 23807 Merate (Lc) ? Italy

P1.18 Interface correlation in short-period multilayers prepaired by various deposition techniques Y. Chushkin, M. Jergel, S. Luby, E. Majkova, Institute of Physics, Slovak Academy of Sciences, 842 28 Bratislava, Slovakia, M. Yamamoto, Research Center for soft X-ray microscopy, Institute of Multidisciplinary Research for Advanced Materials, Tohoku University 2-1-1 Katahira, Sendai 980-8577, Japan, V. Holy, Faculty of Sciences, Masaryk University, 611 37 Brno, Czech Republic

P1.19 Application of Pt/C supermirror to hard X-ray telescope Y. Ogasaka, K. Tamura, H. Satake, K. Yamashita, H. Kito, T. Okajima, Y. Tawara, K. Haga, S. Ichimaru, S. Takahashi, S. Fukuda, A. Goto, S. Kato, K. Nomoto, Department of Physics, Nagoya University, H. Kunieda, The Institute of Space and Astronautical Science, P. Serlemitsos, S. Owens, Y. Soong, K.-W. Chan, F. Berendse, and J. Tueller, Laboratory for High Energy Astrophysics, NASA Goddard Space Flight Center

P1.20 Design and fabrication of broadband and narrowband Mo/Si multilayer mirrors T. Feigl, T. Kuhlmann, S. Yulin, N. Kaiser,  Fraunhofer-Institut für Angewandte Optik und Feinmechanik, Schillerstrasse 1, D - 07745 Jena, Germany

P1.21 Reflectivity and morphology of Mo/Si multilayers with B4C and C barrier layers St. Braun 1 , H. Mai 1 , M. Moss 1 , R. Scholz 2 , A. Leson 1 1 Fraunhofer Institut Werkstoff- und Strahltechnik, Winterbergstr. 28, D-01277 Dresden, Germany 2 Max-Planck-Institut für Mikrostrukturphysik Halle, Weinberg 2, D-06120 Halle/Saale, Germany

P1.22 ESRF Multilayer Facility: The Movie Jean-Christophe Peffen, Christian Morawe, Eric Ziegler, European Synchrotron Radiation Facility, BP 220, F-38043, Grenoble Cedex, France


8:10-9:30 Session 3
8:10-8:50 3.1 INVITED High resolution & reflectivity X-ray and soft X-ray multilayers Troy W. Barbee, Jr Lawrence Livermore National Laboratory, Livermore, CA 94550 USA

8:50-9:10 3.2 High resolution multilayer x-ray optics Christian Morawe, Jean-Christophe Peffen, Eric Ziegler, Andreas K. Freund, European Synchrotron Radiation Facility BP 220, F-38043, Grenoble Cedex, France

9:10-9:30 3.3 Ion Beam Figuring of X-Ray Optics and Optical Surfaces M. Ghigo - O. Citterio, Osservatorio Astronomico di Brera-Milano Via E. Bianchi, 46 - 23807 Merate (Lc), Italy

9:30-10:0 Break

10:00-12:00 Session 4

10:00-10:40 4.1 INVITED The low energy ion assisted control of interfacial structure: ion incident angle effects Haydn N. G. Wadley, University of Virginia, Department of Materials Science and Engineering, Charlottesville, Virginia 22903-2242, USA

10:40-11:00 4.2 Calibration of the wavefront phase change produced by ion erosion of a reflecting multilayer, by at-wavelength interferometry Denis JOYEUX and Daniel PHALIPPOU, Laboratoire Charles Fabry, Institut d'Optique, BP 147 - 91403 Orsay cedex, FRANCE, Joseph BRAAT and Mandeep SINGH, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands, Udo DINGER and Stefan BURKART, Carl Zeiss, Carl-Zeiss-Strasse, 73446 Oberkochen, GERMANY

11:00-11:20 4.3 Bufferlayer engineering for Mo/Si EUVL multilayer mirrors Th. Westerwalbesloh, O. Wehmeyer, Y. Lim, W. Hachmann, U. Kleineberg, U. Heinzmann (University of Bielefeld, Faculty of Physics, D-33615 Bielefeld, Germany), S. Müllender (Fa. C. Zeiss, D-73446 Oberkochen, Germany)

11:20-12:00 4.4 INVITED High reflectance interface-engineered multilayers Sasa Bajt, Lawrence Livermore National Laboratory, 7000 East Avenue, L-395, Livermore, CA 94550, USA

12:00-18:00 Free

18:00-22:00 Banquet